2008/01/14

Applying ICA in wafer map recognization

ICA(Independent Component Analysis)

Assumption: patterns are independent
Final map: regards as some patterns composite result
Training Step:
Step 1: Choose about 20 wafer maps from same pattern, applying ICA to each maps(suppose
have 2 or 3 sources)
Step 2: Averaging as the basis for the pattern

Classification Step:
For the unknown patterns map, applying ICA to get the basis
Using KNN to predicted

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本著作由Chunhung Chou製作,以創用CC 姓名標示-相同方式分享 3.0 Unported 授權條款釋出。